Type Hydra-Gauge - Ultra High Purity Pressure Gauge

Applications
Semiconductor industry
UHP-liquid chemicals distribution


Special Features
Patented double diaphragm
Perfluoroalkoxy (PFA) wetted parts
Stainless steel pressure measurement devices
Gauge is 360° rotatable even after installation
Optional: electrical switch contacts

Description

HYDRA-Line
Our pressure measuring instruments of the HYDRA-line product family have been developed in co-operation with well-known customers in the semiconductor industry. The complete product concept has been adapted to the special requirements of the process equipment and UHP chemicals distribution system sectors.
The HYDRA-Gauge pressure gauge offers high accuracy and reliability, ultra clean wetted parts and surfaces. Furthermore, the production of all wetted parts, cleaning assembly, calibration and packaging takes place in a class 100 cleanroom.

Double safety
The patented HYDRA double diaphragm system enables a safe and reliable separation of the pressure sensor from the process medium. Simultaneously diffusing process media such as HF or HCI vapours are given off to the environment to avoid any falsification of the measuring result or the destruction of the sensor element.
The offer for sale of this product does not infer or imply chemical compatibility with specific applications. Some applications of this product can and will cause diffusion of chemicals through the diaphragm materials.

Selected documents